This paper describes accurate surface profile measurement of an aspherical lens on an ultra-precision grinding machine using the error separation technique.
描述了一种在超精密磨削机床上基于误差分离法的非球面表面形状精密测量系统。
This paper describes accurate surface profile measurement of an aspherical lens on an ultra-precision grinding machine using the error separation technique.
描述了一种在超精密磨削机床上基于误差分离法的非球面表面形状精密测量系统。
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