It is Introduced the principle and method of vacuum leak age detection of the special equipment in the semiconductor production and the experience on solving practice problems with the method.

本文介绍了半导体制造专用设备的真空检漏的原理、方法，以及用该方法解决实际问题的一些实践经验。

youdao

It is Introduced the principle and method of vacuum leak age detection of the special equipment in the semiconductor production and the experience on solving practice problems with the method.

本文介绍了半导体制造专用设备的真空检漏的原理、方法，以及用该方法解决实际问题的一些实践经验。

youdao