Application results show clearly that this method is feasible and that the principle of leak detection by ultrasonic technique is effective to vacuum systems.
实践表明，该方法是可行的。所给出的应用超声波技术检测真空系统泄漏的原理和检测方法是有效的。
It is Introduced the principle and method of vacuum leak age detection of the special equipment in the semiconductor production and the experience on solving practice problems with the method.
本文介绍了半导体制造专用设备的真空检漏的原理、方法，以及用该方法解决实际问题的一些实践经验。
The paper also introduces the composing and characteristics of oil free vacuum environmental simulator, the parameters' analysis of leak detection, and so on.
同时，还介绍了完成该项试验的无油真空环境模拟设备的组成、特点及检漏系统的参数分析等。
This essay introduces the theory and method of helium mass-spectrum leak detection for vacuum system of condenser.
本文系统地介绍了凝汽器真空系统氦质谱检漏原理和方法。
In this paper, the performance of the airtightness for vacuum coating equipment, the characteristics of leak detection with Helium Mass-spectrometer and the leak detection system are described.
本文论述了真空镀膜设备气密性的特点、氦质谱仪检漏特点及其检漏系统，说明氦质谱仪检漏是检查真空镀膜设备漏气的最有效的方法。
In this paper, the performance of the airtightness for vacuum coating equipment, the characteristics of leak detection with Helium Mass-spectrometer and the leak detection system are described.
本文论述了真空镀膜设备气密性的特点、氦质谱仪检漏特点及其检漏系统，说明氦质谱仪检漏是检查真空镀膜设备漏气的最有效的方法。
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