Liquid nitrogen is adopted as protective atmosphere in bell type furnace for which vacuum pumping system are provide also.
在罩式电炉内处理，采取液氮作为保护气体，并设真空抽气设备。
At the appropriate pressure, the chamber is opened to a high-vacuum pumping system that continues to reduce the pressure of the process chamber.
在适当的压强下，工艺室被接通高真空泵系统抽气，以继续降低工艺室的压强。
In addition to pumping air and no condensate and other non-corrosive gases, widely used in pumping speed and the need for high vacuum of truth in this system.
适用于抽除空气及其它无可凝性及无腐蚀性的气体，广泛应用于需要大抽速和高真空的各种真这系统中。
The Neutral Beam Injection (NBI) system requires a clean high vacuum environment. The liquid helium cryocondensation pump with high pumping speed is an ideal vacuum obtain device.
中性束注入系统要求有洁净的动态高真空环境，大抽速液氦冷凝泵是满足此要求的理想真空获得设备。
The system of VPI equipment mainly includes vacuum chamber, heating unit, worktable with its drive unit, vacuum pumping unit, gas-charge unit and control unit, etc.
该设备主要出密封罐、加热系统、升降工作台、真空系统、充气系统、控制系统及密封罐水冷系统等组成。
In design of a vacuum system, generally it concerns distinguishing the regions of gas flow, the conductance of tube, the pumping speed and the pressure of system etc.
在真空系统的设计中，一般涉及到流态判别、流导、泵的抽速和系统的压力等参数。
By simulating the temperature of the cryopanel and the relation between the pressure and pumping gas speed of the cryopump, it was verified the vacuum system design was rational.
通过对低温泵的真空度及其抽速与液氦低温板温度的关系进行模拟，验证了真空系统设计的合理性。
By simulating the temperature of the cryopanel and the relation between the pressure and pumping gas speed of the cryopump, it was verified the vacuum system design was rational.
通过对低温泵的真空度及其抽速与液氦低温板温度的关系进行模拟，验证了真空系统设计的合理性。
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