All surfaces exposed to the vapor from the vaporizer to the vacuum chamber are heated to prevent condensation.
所有暴露至自所述气化器至所述真空室的蒸气的表面均受到加热来防止冷凝。
The vapor flow rate is determined by both the temperature of the vaporizer and the setting of the conductance of the mechanical throttle valve located between the vaporizer and the vacuum chamber.
所述蒸气流速取决于所述气化器的温度及位于所述气化器与所述真空室之间的机械节流阀的流导的设定值二者。
The vapor flow rate is determined by both the temperature of the vaporizer and the setting of the conductance of the mechanical throttle valve located between the vaporizer and the vacuum chamber.
所述蒸气流速取决于所述气化器的温度及位于所述气化器与所述真空室之间的机械节流阀的流导的设定值二者。
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