This pneumatic servo load system can satisfy the needs of double-sided polishing machine, which can successfully produce the ultra-smooth and flat surface on both sides of silicon wafer.
结果表明气动伺服加载系统能满足双面抛光的要求，可以加工出双面超平滑的硅片。
This pneumatic servo load system can satisfy the needs of double-sided polishing machine, which can successfully produce the ultra-smooth and flat surface on both sides of silicon wafer.
结果表明气动伺服加载系统能满足双面抛光的要求，可以加工出双面超平滑的硅片。
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