先沉积氮化硅薄膜再氢等离子体处理能得到更好的钝化效果。
Depositing SiNx thin film followed by hydrogen plasma treatment will result in better passivation effect.
采用光化学气相淀积(光cvd)氮化硅薄膜进行器件的表面钝化，使整个器件提高了可靠性。
The devices were passivated by the thin film of Photo-CVD silicon nitride, we found that the reliability of the devices was to be raised.
硅基太阳能电池中，氮化硅用作钝化膜和减反射膜；
In the fabrication of solar cell, silicon nitride thin film is used as passivating film and anti-reflecting film.
硅基太阳能电池中，氮化硅用作钝化膜和减反射膜；
In the fabrication of solar cell, silicon nitride thin film is used as passivating film and anti-reflecting film.
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