介绍了一种新型非制冷高速高灵敏度硅基电容式红外探测器的工作原理，描述了探测器的设计思想及制作工艺。
A novel uncooled silicon capacitive infrared detector with high speed and sensitivity is introduced. The design idea and fabrication processes of this infrared detector are described in detail.
介绍了一种新型非制冷高速高灵敏度硅基电容式红外探测器的工作原理，描述了探测器的设计思想及制作工艺。
A novel uncooled silicon capacitive infrared detector with high speed and sensitivity is introduced. The design idea and fabrication processes of this infrared detector are described in detail.
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