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ZrO_2 films deposited by electron beam evaporation method are treated by oxygen plasma.
用低能氧等离子体对电子束热蒸发后的沉积氧化锆薄膜进行了后处理。
youdao
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ZrO_2 films deposited by electron beam evaporation method are treated by oxygen plasma.
用低能氧等离子体对电子束热蒸发后的沉积氧化锆薄膜进行了后处理。
youdao