The progresses of preparation and purification of tungsten hexafluoride, especially the preparation of high purity tungsten hexafluoride used in the electronic industry, are introduced.
介绍了国外六氟化钨的制备和精制工艺进展，重点描述了电子工业中应用的高纯度六氟化钨的制备工艺。
The progresses of preparation and purification of tungsten hexafluoride, especially the preparation of high purity tungsten hexafluoride used in the electronic industry, are introduced.
介绍了国外六氟化钨的制备和精制工艺进展，重点描述了电子工业中应用的高纯度六氟化钨的制备工艺。
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