This paper introduce a new type of high precision measurement system based on plane isoclinic interference theory (PUT).
介绍了一种新型的基于平面等倾干涉原理的高精度平面度测量系统。
This paper introduce a new type of high precision measurement system based on plane isoclinic interference theory (PUT).
介绍了一种新型的基于平面等倾干涉原理的高精度平面度测量系统。
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