Compared with the technology for binary optical mask, the technology has the following strong points: process simplification, short period of fabrication and easy operation.
与二元光学元件掩模的制作工艺相比，该技术具有工艺简单、制作周期短且易于操作的优点。
The results indicate that the technology using aluminum as the mask is superior to that using the thick photoresist as the mask in AWG fabrication.
结果表明，在AWG器件制作工艺上，铝掩模技术明显优于厚胶掩模技术。
Single step mask fabrication process is developed for LIGA technology, which made mask-making process simplified.
在LIGA技术研究中提出了一次掩膜成型法，简化了工艺过程；
Single step mask fabrication process is developed for LIGA technology, which made mask-making process simplified.
在LIGA技术研究中提出了一次掩膜成型法，简化了工艺过程；
应用推荐