A method for designing and fabricating a novel deformable mirror with large effective area is proposed on the basis of MEMS technology.
基于MEMS技术体硅工艺，提出一种新型大有效面积的连续变形反射镜的设计制造方法。
A method for designing and fabricating a novel deformable mirror with large effective area is proposed on the basis of MEMS technology.
基于MEMS技术体硅工艺，提出一种新型大有效面积的连续变形反射镜的设计制造方法。
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