On ultra precision cutting, grinding and non-traditional machining, there is a hard problem between long travel and high precision, especially in multi-coordinate machining.
在超精密切削、磨削、特种加工中，大行程驱动与高精度进给是难以解决的矛盾，也是多坐标超精密加工的难点。
Aimed at tri-coordinate ultra precision machining, a stage used for tri-coordinate non-traditional machining was designed, which realizes long travel tri-coordinate ultra precision machining.
本文以三维结构的超精密加工为对象，进行了适合超精密三维结构特种加工运动平台的设计，实现了较大行程的三维精密运动。
Aimed at tri-coordinate ultra precision machining, a stage used for tri-coordinate non-traditional machining was designed, which realizes long travel tri-coordinate ultra precision machining.
本文以三维结构的超精密加工为对象，进行了适合超精密三维结构特种加工运动平台的设计，实现了较大行程的三维精密运动。
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