简要介绍了等离子体技术和微细加工技术。
Plasma technology and micro process technology are presented simply.
放电单脉冲能量的精确控制是实现微细电火花加工的关键技术之一。
The accurate control of single pulse discharge energy is one of key techniques in micro-EDM.
微能脉冲电源是微细电火花加工的一项关键技术。
Pulse power supply with micro energy is a core technique for micro-EDM.
对于微机电系统，更重要的是微细零件的制造和加工。
To MEMS, the important role is the manufacture and process of micro-parts.
针对微细轴的加工问题，分析了当前普遍使用的特种加工方法。
The technology may be employed in micro-shafts processing by the special movement mode.
针对微细轴的加工问题，分析了当前普遍使用的特种加工方法。
The technology may be employed in micro-shafts processing by the special movement mode.
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