Finally, the applications of the amorphous carbon film are discussed.
最后对对非晶态碳膜的应用前景进行了讨论。
In this paper, the recent research progress of low-K fluorinated amorphous carbon film is introduced.
着重叙述了具有低介电常数的氟化非晶碳薄膜的研究进展。
In this paper, the recent research progress of low-K fluorinated amorphous carbon film is introduced.
着重叙述了具有低介电常数的氟化非晶碳薄膜的研究进展。
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