Primary and secondary sequence of parameters is temperature, time, flow rate of hydrogen and nitrogen.

各参数对沉积速率影响的主次顺序为：沉积温度、沉积时间、氢气流量、氮气流量。

youdao

Primary and secondary sequence of parameters is temperature, time, flow rate of hydrogen and nitrogen.

各参数对沉积速率影响的主次顺序为：沉积温度、沉积时间、氢气流量、氮气流量。

youdao