The single crystal furnace is a special equipment of growth single crystal for LSI.
炉是生长大规模集成电路所需要硅单晶的专用设备。
This paper proposes a practical speed control system for single crystal furnace lifting mechanism.
文章提出了一种实用的单晶炉提拉速度控制系统。
This paper proposes a practical speed control system for single crystal furnace lifting mechanism.
文章提出了一种实用的单晶炉提拉速度控制系统。
应用推荐