The use of Scanning Near field Acoustic Microscope (SNAM) in measuring the topography of precise surface is presented.
描述了一种用于检测超精表面形貌的扫描近场声显微镜（SNAM）。
The use of Scanning Near field Acoustic Microscope (SNAM) in measuring the topography of precise surface is presented.
描述了一种用于检测超精表面形貌的扫描近场声显微镜（SNAM）。
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