The results indicates that doping and temperature of heat treatment greatly affectes the structure of thin film and its size of crystalline grain, thereby, influences its conduction and sensibility.
结果表明，掺杂和热处理温度对薄膜晶粒尺寸的大小、薄膜的结构形态均有较大的影响，进而影响薄膜的电导及传感器的灵敏度。
In addition, with the increasing distance between the filament and the substrate, the crystalline volume fraction and the grain size of poly-Si films notablely decrease.
另外，随着热丝与衬底间距的增大，沉积出的多晶硅薄膜样品的晶化率明显减小，薄膜的晶粒尺寸也相应减小。
The crystalline grain size and the distortion of interfacial atoms have great influence on the d.
晶界原子畸变和晶粒尺寸对纳米体系的交流电导有重要的影响。
The crystalline grain size and the distortion of interfacial atoms have great influence on the d.
晶界原子畸变和晶粒尺寸对纳米体系的交流电导有重要的影响。
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