Several compensation methods of thermal sensitivity shift of polysilicon pressure sensor are introduced, whose principles and characteristics are discussed.
列举了几种多晶硅高温压力传感器的热灵敏度漂移补偿方法，并分别讨论了它们的原理及特点。
Several compensation methods of thermal sensitivity shift of polysilicon pressure sensor are introduced, whose principles and characteristics are discussed.
列举了几种多晶硅高温压力传感器的热灵敏度漂移补偿方法，并分别讨论了它们的原理及特点。
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