此外，为机床模具加工和微细加工精度有所改善。
Also, the precision of machine tools for die machining and microfabrication has improved.
微电铸，又称精密电铸，是一种全新的微细加工技术。
As a new micro fabrication technology, micro electroforming I.
随着特征尺寸的不断缩小，微细加工技术的水平逐渐提高。
Along with the characteristic size continuously reducing the micron processing technology's level gradually increase.
介绍了飞秒激光双光子微细加工技术的原理和应用的现状。
The principle and current application of the femtosecond two-photon microfabrication are introduced.
微细电化学线切割加工是最近出现的一种微细加工新方法。
Wire electrochemical micromachining(WEMM) is a recent new method for micro-machining.
本文论述了主要特种微细加工的原理、特点、现状及其应用。
In this paper, the principle, the characteristic, present state of chief special microfabrication and their applications are presented.
采用微细加工技术制作出无基底的双材料微悬臂梁阵列结构。
The micro-electromechanical system (MEMS) technology is adopted to fabricate the substrate-free bi-material micro-cantilever arrays.
实验结果表明，利用微细加工制作微光学编码器是完全可行的。
Experiment indicates that the fabricated encoder can measure the displacement and is completely feasible and has obvious advantages both in cost and miniaturization compared with tradition...
实验结果表明，利用微细加工制作微光学编码器是完全可行的。
Experiment indicates that the fabricated encoder can measure the displacement and is completely feasible and has obvious advantages both in cost and miniaturization compared wi...
采用了光刻、电镀、溅射等微细加工工艺制造了MGELR的定子。
The micromachining process like photolithograph, electroplate and sputtering etc is adopted to fabricate the stator of MGELR.
提出了基于扫描离子电导显微术(SICM)的电化学微细加工方法。
The method of electrochemical micro-process based on scanning ion conductance microscopy (SICM) is developed.
介绍了一种通过微细加工技术即二次X射线曝光制作凹面光栅的方法。
The technique of fabricating concave gratings in PMMA by double X-ray exposures is described.
本文探讨了生物芯片两大理论基础- 分子生物技术和微细加工技术；
The fundamental theory-molecular biotechnology and micro fabrication technology was described in unison.
当今脉宽调制技术在电火花微细加工所使用的脉冲电源中得到广泛应用。
Now pulsewidth modulating technology is widely used in pulse power needed by electric spark fine machining.
实验结果表明此微细加工方法是可行的，从而开辟了微细加工的新途径。
The experiment results indicate that the micro fabrication process is feasible whereby b...
摘要：超高金属微细阵列电极在微细加工领域和生命科学领域有广泛应用。
Abstract: the micro electrode array has wide used both in the micro-fabrication field and the life science field.
本发明是一种利用脉冲激光精确控制曝光时间的方法，用于微细加工技术领域。
The invention discloses a method for accurately controlling exposure time by utilizing pulse laser, which is applied to the technical field of micromachining.
微磨料水射流加工技术正成为制造微细结构零件重要的经济高效的微细加工技术。
Micro abrasive water jet machining (MAJM) is becoming an important machining technique for cost effective micro machining.
微波电子回旋共振等离子体是淀积薄膜、微细加工和材料表面改性的一种重要手段。
The microwave electron cyclotron resonance (ECR) plasma is one of the most important means for depositing thin films and microfabrications as well as surface modifications of materials.
提出一种基于集成电路超微细加工技术制造电磁干扰滤波器的薄膜集成制造新技术。
A new technique for fabricating EMIF in thin film IC based on superfine processing technique is proposed.
叙述了硅基传感器微机械加工的特点和要求，简要说明了硅衬底微细加工的常用方法。
The characteristics and requests of micromachining for silicon based sensors are introduced. The conventional methods of si substrate microfabrication are briefly described.
简要介绍硬质合金、压电陶瓷和单晶硅的加工特点及利用超声微细加工这三种材料的优势。
The paper introduces simply the characteristics of three experimental materials used to process micro-structures, single-crystal silicon, piezoelectricity ceramic and cemented carbides.
通过离子束技术和微细加工技术可以实现DLC薄膜的图形化并能大大提高薄膜的场发射性能。
A patterned DLC thin film cathode was fabricated by reactive -ion etching method and mic ro -fabrication technology.
加工工艺参数准确合理的分析方法是优化组合电火花微细加工中多目标工艺参数的重要前提和保证。
The accurate analysis method of performances plays an important role in the optimization with multiple performance objectives of micro electrical discharge machining (EDM).
本文在综述国外微细加工技术现状的基础上，重点介绍该技术在航空机载设备元器件制造中的应用。
The present stat of the technology abroad is summarized, on the basis of which applications of such technology to manufacture of parts and components of aeronautical airborne equipments are described.
本文结合激光微细加工与并联机构两个领域，提出了用于激光微细加工系统的三自由度并联平台课题。
This article combines two fields which are laser minuteness process and parallel mechanism to put forward 3-dof parallel platform used in the laser minuteness process system.
本研究结合功能薄膜的特点，研究了感光溶胶-凝胶技术，在薄膜的制备过程中就考虑到薄膜的微细加工。
Combined with characteristics of functional films, a photosensitive sol-gel technique, in this paper, was examined, during which the fine-patterning process of the films was taken into consideration.
文中分析了在极不均匀电场下间隙的击穿过程，并用试验研究了微细加工时电极极性对间隙击穿电压的影响。
The process of dielectric breakdown in uneven electric field is analyzed and the influence of electrode polarity on gap breakdown is researched.
文中分析了在极不均匀电场下间隙的击穿过程，并用试验研究了微细加工时电极极性对间隙击穿电压的影响。
The process of dielectric breakdown in uneven electric field is analyzed and the influence of electrode polarity on gap breakdown is researched.
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