Methods for high temperature deposition an amorphous carbon film with improved step coverage are provided.
提供了一种以提高的台阶覆盖率高温沉积非晶碳膜的方法。
The electroconductive member is produced by forming an amorphous carbon film on the surface of a base material.
通过在基材的表面上形成非 晶碳膜可得到导电性部件。
In this paper, the rf plasma deposited method has been reported. On the silicium substratum, the amorphous carbon film with excellent properties have been made.
本文介绍了用射频等离子体化学气相沉积的方法，在硅基底上制备得到具有优异性能的非晶态碳膜。
The amorphous carbon film has interesting properties which are close to those of diamond. It may be good used for the antiabrasion layers and antireflexions films of the infrared devices.
非晶态碳膜具有许多接近于金刚石的、令人感兴趣的性能，能很好地用作红外零件上的保护膜和增透膜。
Disclosed is a slide structure which can ensure to suppress the abrasion of an amorphous carbon film caused by a chemical reaction between the amorphous carbon film and an organic molybdenum compound.
本发明提供一种滑动结构，其能够切实地抑制由非晶质碳被膜和有机钼化合物的化学反应所导致的非晶质碳被膜的磨损。
The results show: the amorphous hydrogenated carbon film can be fabricated on PET surface by plasma-enhanced chemical vapor deposition.
研究结果表明：用射频等离子体增强化学气相沉积法，可以在PET上沉积厚度为纳米至微米级的非晶碳氢膜。
The results show: the amorphous hydrogenated carbon film can be fabricated on PET surface by plasma-enhanced chemical vapor deposition.
研究结果表明：用射频等离子体增强化学气相沉积法，可以在PET上沉积厚度为纳米至微米级的非晶碳氢膜。
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