The theoretic analyses show that the full width at half maximums (FWHM) of different slopes are the same, that is the FWHM of confocal axial response is irrelevant to tilt Angle.
理论分析表明共焦轴向响应的半极值宽与被测表面的倾角大小无关。
The theoretic analyses show that the full width at half maximums (FWHM) of different slopes are the same, that is the FWHM of confocal axial response is irrelevant to tilt Angle.
理论分析表明共焦轴向响应的半极值宽与被测表面的倾角大小无关。
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