Silicon micromachined gyroscope is mainly driven by electrostatic comb-finger actuator which has advantages of simple structure, low power supply, high sensitivity and not susceptible to temperature.
静电梳齿微驱动器因其结构简单、功耗低、灵敏度高、受温度影响小，成为硅微陀螺仪的主要驱动方式。
Silicon micromachined gyroscope is mainly driven by electrostatic comb-finger actuator which has advantages of simple structure, low power supply, high sensitivity and not susceptible to temperature.
静电梳齿微驱动器因其结构简单、功耗低、灵敏度高、受温度影响小，成为硅微陀螺仪的主要驱动方式。
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