The fluid transmission mechanism is a key infrastructure of immersion lithography equipment, which is used to execute the liquid dispensation and recovery, and ensures no leakage or bubbles.
浸没液体传送装置是浸没光刻设备中的一个关键组件，用来实现缝隙内液体的平稳注入和回收，同时保证无泄漏和气泡产生。
The fluid transmission mechanism is a key infrastructure of immersion lithography equipment, which is used to execute the liquid dispensation and recovery, and ensures no leakage or bubbles.
浸没液体传送装置是浸没光刻设备中的一个关键组件，用来实现缝隙内液体的平稳注入和回收，同时保证无泄漏和气泡产生。
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