Constancy of chemical etch rate method was modified so as to reduce the influencing factors such as temperature and concentration of HF acid. The efficiency and accuracy are improved.
基于差动原理对HF酸恒定化学蚀刻速率法进行改进，以降低环境(温度、HF酸浓度等)变化对测量结果的影响，从而提高测量效率和测量准确性。
Constancy of chemical etch rate method was modified so as to reduce the influencing factors such as temperature and concentration of HF acid. The efficiency and accuracy are improved.
基于差动原理对HF酸恒定化学蚀刻速率法进行改进，以降低环境(温度、HF酸浓度等)变化对测量结果的影响，从而提高测量效率和测量准确性。
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