Piezoelectric inchworm precision linear actuator based on the inchworm principle achieves a bidirectional large-travel and high-precision linear motion.
压电尺蠖精密驱动器是基于尺蠖原理实现双向、大行程、高精度直线运动的精密驱动器。
A kind of piezoelectric micro-actuator with Nano-step and long range, based on the principle of inchworm motion, is introduced in this paper.
介绍了一种基于尺蠖运动原理大范围纳米级步距压电微动工作台。
A kind of piezoelectric micro-actuator with Nano-step and long range, based on the principle of inchworm motion, is introduced in this paper.
介绍了一种基于尺蠖运动原理大范围纳米级步距压电微动工作台。
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