On the basis of SAW technology, this thesis designs a SAW humidity sensor. Include the design of IDT (interdigital transducer), the thin film as well as the frequency measurement system.
在对SAW传感器技术进行研究的基础上，本文设计了一个SAW湿度传感器，包括IDT(叉指换能器)的设计、薄膜的设计以及频率测量系统的设计。
On the basis of SAW technology, this thesis designs a SAW humidity sensor. Include the design of IDT (interdigital transducer), the thin film as well as the frequency measurement system.
在对SAW传感器技术进行研究的基础上，本文设计了一个SAW湿度传感器，包括IDT(叉指换能器)的设计、薄膜的设计以及频率测量系统的设计。
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