• The character of the laser direct writing device (LDWD) is analyzed.

    分析了激光写入与加工设备特点

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  • This article presents the facture of a holographic optical element for laser direct writing synthetic holograms.

    文章旨在提出一种用于激光合成全息拍摄全息光学元件制作技术。

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  • At last, the feasibility of fabricating light guide plate by double beam laser direct writing system is confirmed.

    最后论证光束激光系统制作亚微米光栅型光板可行性。

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  • To improve the precision of the laser direct writing device, researches have been done for the focusing servo system.

    为了提高激光设备光刻系统写入精度对光探头调焦系统进行了研究

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  • The optical writing object lens of the laser direct writing device must be focused in spots by a focusing-servo mechanism.

    激光直接写入设备需要有分辨力的调焦伺服机构对光刻物镜进行调焦伺服。

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  • A new pinhole-focusing scheme using referenced defocus signal is applied to an automatic subsystem for laser direct writing.

    一种新的采用基准信号针孔调焦方案用于激光自动对焦子系统

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  • The experimental exposure results on the laser direct writing system showed good agreements with the theoretical calculation.

    激光直接写入系统曝光试验结果理论计算相符

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  • A model for compensation of radial shift was established to further improve fabrication precision during polar laser direct writing.

    为了进一步提高光学元件线条制作精度,建立极坐标激光写时线条中心径向漂移补偿模型

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  • The lithography technique to fabricate the curved microlens array on the curved substrate by using laser direct writing system was also given.

    文中给出了激光设备曲面基底上进行光刻制作曲面微透镜阵列方法

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  • The exposure dose distribution and line width control for the laser direct writing system are analyzed. Some experiments are also carried out.

    激光光刻曝光分布线控制进行了相关理论分析实验

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  • A linewidth stabilizing method for defocusing laser direct writing is proposed for further improvement of line quality of diffractive optical elements.

    为了提高激光加工衍射光学元件时线条质量提出一离焦激光直写的线宽稳定方法

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  • Laser direct writing system is the key equipment for fabrication of optical diffractive elements, and the defocus detection technique is the important sub-tech in it.

    激光制作衍射光学元件关键设备检测技术是其中的重要单元技术之一。

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  • Femtosecond laser direct writing in transparent materials and the two-photon photopolymerization technology are used to fabricate the phase-gratings and Dammann grating.

    采用激光透明材料改性飞秒激光双光子聚合技术制备位相光栅和达光栅等微光学元件。

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  • An innovative parallel laser direct writing system based on intensity modulating spatial light modulator (SLM) is proposed, and the math model about this system is established.

    提出一种基于强度调制型空间调制器(SL M)的并行激光系统建立了系统数学模型

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  • DOE with high diffractive efficiency can be fabricated by laser aided fabrication technology LDWS (laser direct writing system), similar to the way manufacturing micro electronics.

    采用类似于微电子加工手段激光辅助制造技术——激光技术可以制作具有衍射效率DOE

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  • The laser direct writing(LDW) system SVGLDW 04 with a projection optical system and a spatial light modulator(LCD-SLM) can expose a reduction pattern directly on a photoresist plate.

    通过双远心成像路,激光LDW系统SVG-LDW04把液晶空间调制器(LCD-SLM的光斑直接成像在光刻胶板上,得到高质量的光斑图形

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  • The common fabrication technologies of binary optical elements were expatiated, including etching, thin-film deposition, direct writing, excimer laser projection and gray-scale masks.

    综述了二元光学元件常用制作工艺技术包括台阶刻蚀法薄膜沉积法直接写入法、准分子激光加工灰阶掩模法。

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  • In the BOE laser direct-writing device, the adjusting effect of spindle velocity is one of the key factors for determining the lithography effectiveness and accuracy.

    元光学元件激光设备中,主轴速度调节效果好坏决定刻划效率精度的关键因素之一

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  • This paper presents a widely available CO2 laser scriber to perform the direct-writing ablation of poly (methyl methacrylate) (PMMA) substrate for the development of microfluidic chips.

    提出一种广泛使用CO2激光法,直接读写烧蚀的方式,进行快速甲基丙烯酸甲酯(PMMA)基材流控分析芯片的制造。

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  • In this paper, based on the technique of laser micro-fine cladding and flexibly direct writing, micro-fine conductive lines of high quality and high property are fabricated on glass substrates.

    设计了一种具有方形光斑新型激光系统,用双远心投影透镜组获得方形光斑以逐点光刻模式运行, 改善了衍射图形光刻质量, 提高了系统运行效率。

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  • In this paper, based on the technique of laser micro-fine cladding and flexibly direct writing, micro-fine conductive lines of high quality and high property are fabricated on glass substrates.

    设计了一种具有方形光斑新型激光系统,用双远心投影透镜组获得方形光斑以逐点光刻模式运行, 改善了衍射图形光刻质量, 提高了系统运行效率。

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