The load lock chamber may be provided with at least two mutually distinct object support positions.

所述装载锁闭装置室设有至少两个彼此不同的物体支承位置。

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The load lock chamber may be provided with at least two mutually distinct object support positions.

所述装载锁闭装置室设有至少两个彼此不同的物体支承位置。

youdao