Additionally, the grid size is proportional to the minimum electron-beam-spot size used to create the masks for the design.

此外，栅格大小与制造设计掩模的最小化电子束点大小成比例。

youdao

Additionally, the grid size is proportional to the minimum electron-beam-spot size used to create the masks for the design.

此外，栅格大小与制造设计掩模的最小化电子束点大小成比例。

youdao