This paper proposes the new design idea in view of the insufficiency and the flaw of the 1st MOCVD system.
针对第一代MOCVD系统的不足和缺陷提出了全新的设计理念。
This method improves the automatic control level of MOCVD and ensures the repeatability and stability of the process, makes MOCVD system gas...
该方法提高了MOCVD系统的自动化控制水平，确保了工艺的重复性和稳定性，使得MOCVD系统气体流量控制水平有显著提高。
In order to enhance the reliability and repeatability of the ferroelectric thin film preparation, the liquid source MOCVD system is designed based on PLC.
为了提高制备铁电薄膜的可靠性和重复性，设计了基于PLC控制的液态源MOCVD系统。
According to the characteristics and requirements of Xidian Univ. MOCVD system, a research and design about the MOCVD control system based on programmable logic controller are carried out.
针对西安电子科技大学MOCVD系统，根据MOCVD系统工艺要求，进行了基于可编程逻辑控制器的MOCVD设计与研究。
The MOCVD system is specifically introduced, and the gas flow automatic control method based on the mass flow controller(MFC) and programmable logic controller(PLC) is studied and analyzed.
研究分析了基于质量流量控制器、可编程序控制器和触摸屏的自动控制系统气体流量自动控制方法。
The results of the imitation experiments show that the method of the compound control can be used to improve the control performance of the system temperature for MOCVD effectively.
仿真和实验表明，这种复合控制的方法能有效地改善金属有机化合物化学气相淀积系统温度的控制性能。
The system of MOCVD was designed, assembled and debugged. Mo substrate was heated in a cold-wall MOCVD reactor in order to heat it more centrally;
设计、组装、调试了MOCVD系统，采用冷壁加热方式，对基体实现选择性加热；
It provides a new method to the MOCVD control system design, and it is good for further researched and developed of the MOCVD control system.
它为MOCVD控制系统的设计提供了新的思路和方法，为进一步研发MOCVD控制系统奠定了基础。
It provides a new method to the MOCVD control system design, and it is good for further researched and developed of the MOCVD control system.
它为MOCVD控制系统的设计提供了新的思路和方法，为进一步研发MOCVD控制系统奠定了基础。
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