• In a trench-gated MIS device, contact is made to the gate within the trench, thereby eliminating the need to have the gate material, typically polysilicon, extend outside of the trench.

    沟槽栅极MIS器件,在沟槽中形成栅极接触,从而消除使栅极材料通常为多晶硅延伸至沟槽需要

    youdao

  • In a trench-gated MIS device, contact is made to the gate within the trench, thereby eliminating the need to have the gate material, typically polysilicon, extend outside of the trench.

    沟槽栅极MIS器件,在沟槽中形成栅极接触,从而消除使栅极材料通常为多晶硅延伸至沟槽需要

    youdao

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