Abstract: the influence of different post exposure bake (PEB) temperature on thermal swelling and the internal stresses of SU-8 photoresist were investigated.
摘要：对不同后烘温度条件下，SU - 8胶在电铸液中的热溶胀性及胶层的内应力大小进行了研究。
Abstract: the influence of different post exposure bake (PEB) temperature on thermal swelling and the internal stresses of SU-8 photoresist were investigated.
摘要：对不同后烘温度条件下，SU - 8胶在电铸液中的热溶胀性及胶层的内应力大小进行了研究。
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