The thickness of the oxide layer is analyzed by AES depth profile, and the law of influence of temperature, oxygen pressure and time on the thickness of the oxide layer is studied respectively.
用AES深度剖析研究了氧气氧化层的厚度，并研究了温度、氧气压力和时间对氧气氧化层厚度影响的规律；
The thickness of the oxide layer is analyzed by AES depth profile, and the law of influence of temperature, oxygen pressure and time on the thickness of the oxide layer is studied respectively.
用AES深度剖析研究了氧气氧化层的厚度，并研究了温度、氧气压力和时间对氧气氧化层厚度影响的规律；
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