An inductively coupled plasma antenna, which is installed on a center of the dielectric window, transfers radio frequency power from an RF power supply to the interior of the processing chamber.
感应耦合等离子体触角安装在介电窗上以便定位在介电窗的中心上，并且将来自射频电源的射频功率传输到加工室内部。
In terms of hardware, the detection system is divided into radio frequency module, H2S sensor conditioning circuits, routers, coordinator, display, serial port and power supply module circuit design.
硬件方面，主要分为无线射频模块、H2S传感器调理电路、路由器、协调器、显示、串口、电源模块等元电路进行设计。
The present invention provides a radio frequency (RF) power supply in a mass spectrometer.
本发明提供了一种用在质谱仪中的射频(RF)电源。
The present invention provides a radio frequency (RF) power supply in a mass spectrometer.
本发明提供了一种用在质谱仪中的射频(RF)电源。
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