The invention relates to a wafer clamp for an ion implanter which belongs to the field of semiconductor equipment manufacture.
本发明涉及一种离子注入机用的晶片夹，属于半导体装备制造领域。
The invention relates to a wafer clamp for an ion implanter which belongs to the field of semiconductor equipment manufacture.
本发明涉及一种离子注入机用的晶片夹，属于半导体装备制造领域。
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