In Chemical-Mechanical polishing experiments we produced optical quality super smooth surfaces on single-crystal silicon, but cannot insure the surface figure.
使用机械 -化学抛光法加工大尺寸单晶硅可获超光滑表面 ，但很难保证良好的面型。
So, magnetic fluid-assisted polishing is suitable for manufacturing optical elements with super-smooth surface.
结果表明：磁流体辅助抛光可以用于对光学元件进行超光滑加工；
So, magnetic fluid-assisted polishing is suitable for manufacturing optical elements with super-smooth surface.
结果表明：磁流体辅助抛光可以用于对光学元件进行超光滑加工；
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