A new type of zine oxide (ZnO) thin film devices can be realized utilizing piezoelectric and surface micromachine technology.
利用压电薄膜和表面微机械技术可实现新型的氧化锌簿膜器件。
In recent years, much attention has been paid to novel miniature piezoelectric devices which based on piezoelectric thin film technology and MEMS technology.
近年来，基于压电薄膜技术和微机械加工技术的微型压电器件受到了人们的日益关注。
In recent years, much attention has been paid to novel miniature piezoelectric devices which based on piezoelectric thin film technology and MEMS technology.
近年来，基于压电薄膜技术和微机械加工技术的微型压电器件受到了人们的日益关注。
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