The reason why tungsten wire is easy to break in the silicon thin film deposition process by hot wire deposition method was explained.
揭示了常规热丝法薄膜淀积工艺中热钨丝易断裂的原因。
The reason why tungsten wire is easy to break in the silicon thin film deposition process by hot wire deposition method was explained.
揭示了常规热丝法薄膜淀积工艺中热钨丝易断裂的原因。
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