A new vacuum coating system was designed by analyzing the features of current liquid coating system.
通过分析国内外液体喷涂设备的特点，研制了真空后喷涂试验系统。
The technology and applications of optical films and optoelectronic films are described, the vacuum coating system and the results of application are also demonstrated.
本文介绍了光学薄膜和光电子器件用薄膜的技术和应用，以及真空镀膜及其应用结果。
In this paper, the performance of the airtightness for vacuum coating equipment, the characteristics of leak detection with Helium Mass-spectrometer and the leak detection system are described.
本文论述了真空镀膜设备气密性的特点、氦质谱仪检漏特点及其检漏系统，说明氦质谱仪检漏是检查真空镀膜设备漏气的最有效的方法。
In this paper, the performance of the airtightness for vacuum coating equipment, the characteristics of leak detection with Helium Mass-spectrometer and the leak detection system are described.
本文论述了真空镀膜设备气密性的特点、氦质谱仪检漏特点及其检漏系统，说明氦质谱仪检漏是检查真空镀膜设备漏气的最有效的方法。
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