在将来，这个机械装置也许会被其他微执行器或者控制策略代替。
This mechanism can be replaced by micro actuators or other control strategies in the future.
显微立体成像微操作系统上测试了二维微执行器的位移性能。
The displacement of the micro actuator is measured by using the stereo vision micromanipulation systems.
近年来，微传感器，微执行器和微机械部件得到了深入的研究。
In recent years, micro sensors, micro actuators, and micro mechanical components were lucubrated.
根据微执行器的驱动方式的不同，对微执行器的应用进行了介绍。
The paper introduces some applications of micro actuators according to the different drive modes.
利用SU-8光刻胶制备电铸模和微电铸工艺，制造了二维微执行器原型。
The prototype of the micro actuator is fabricated by means of micro electroforming and SU-8 photolithography techniques.
微执行器是微机电系统的核心部件，应用范围广泛，具有重要的研究价值。
Micro actuator is the kernel part of MEMS, with wide application range and important research value.
介绍了微执行器的驱动方式及各自的优缺点、静电梳齿结构的特点和应用以及静电梳齿结构的工作原理。
The driving mode, the advantage and disadvantage upon micro-actuator, the traits, applications and the principle of electrostatic comb-drive are introduced.
实验表明，该模型在交变磁场的作用下，微执行器将做高频率划动，使水下微机器人模型能够在水中产生运动。
Through these experiments, we find that the micro actuators vibrate in high frequency under the action of the alternating magnetic field, which make the micro robot model move forward in the water.
介绍了MEMS的特点、特征、技术发展趋势，MEMS器件的类型及其功能，并以多层弯曲磁芯结构微执行器为例介绍了磁驱动微执行器工作原理与制作工艺过程。
In this paper, the feature and the development trend of the MEMS technology are introduced. And the operational principles and the fabrication craft of the magnetic micro-actuator with a mult...
在光学精密测量中，PZT常作为移相驱动器用于各类干涉仪，作为纳米精度的微位移执行器驱动各种精密平移台，以及用于精密位移或压力传感器等。
In the measurement of optical, PZT is often used as driving machine to the interference instruments, then the nonlinearity should affect the precision of the measurement.
并运用该工艺实现了微磁执行器。
利用SU -8光刻胶为主要材料，采用多级曝光和电铸金属实现3D结构的工艺技术，研制出了微针执行器的雏形器件。
The rudiments of microneedle actuator have been developed, which is mainly made of SU 8 photoresist, and its 3D construction is fabricated by multistep exposal and electroforming metal.
生化微系统是MEMS的重要方向之一，而生化样品的微量取样和计量是生化分析过程的重要环节，微针执行器的研究因此受到关注。
Biochemical microsystem is one of the most important focuses of MEMS, and micro-sampling and measuring is the crucial process of analysis. Therefore, emphases have been paid on microneedle actuator.
针对压电陶瓷微位移执行器动态响应速度慢的问题进行了研究，提出用数字PID方法加以解决，并研制出一套实用控制系统。
The problem of slow step response in electrostrictive actuator is studied and a digital PID method is proposed to compensate the slow step response.
利用梯度功能压电执行器设计和制作了双悬臂梁结构的微夹钳，用作微型机器人操作系统的操作手。
A pair of functionally gradient piezoelectric cantilevers was used to fabricate a microgripper, which is used as the micromanipulator of micro robot operating system.
对微位移放大器的动态特性进行了建模分析，将放大机构与压电叠堆执行器相耦合，得到了该微位移放大器系统的传递函数。
The amplifying mechanism is modeled and analyzed with the piezoelectric actuator incorporated, the transfer function of the amplifier system is obtained.
对微位移放大器的动态特性进行了建模分析，将放大机构与压电叠堆执行器相耦合，得到了该微位移放大器系统的传递函数。
The amplifying mechanism is modeled and analyzed with the piezoelectric actuator incorporated, the transfer function of the amplifier system is obtained.
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