本文提出了一种基于数字调制和解调技术的电容式位移传感器的设计方法。
This paper presents a design method of capacitance displacement sensor based on digital synthesis technology.
德国米铱公司提供的电容式位移传感器被用于以纳米级的精度校准芯片光刻机中镜片的位置，测量晶圆厚度等应用。
Capacitive sensors from Micro-Epsilon are used, among other things, for the positioning, displacement measurement and thickness measurement in the semiconductors area.
该文利用有限元法对电容式角位移传感器三维电场进行分析，仿真研究不同结构参数的敏感元件，所得结论与实验结果吻合。
Electric field of capacitive angular sensor are analyzed by finite element methodology. Sensors with different dimensions are studied by simulation. The result is proved by the experiment.
介绍一种电容式角位移测量系统，它以电容传感器作为敏感元件，以89c51单片微机为控制核心。
A capacitive angular-position detective system is introduced. It takes the capacitive sensor as the sensing component, and the 89c51 single chip processor as the core.
另外厚膜电容式压力传感器还有一种重要的应用，它可以用来对位移进行测量，例如对压电陶瓷PZT的精密位移测量。
There is also an important application that can be used to measure displacement, for instance, PZT piezoelectric ceramic precision displacement measurement.
另外厚膜电容式压力传感器还有一种重要的应用，它可以用来对位移进行测量，例如对压电陶瓷PZT的精密位移测量。
There is also an important application that can be used to measure displacement, for instance, PZT piezoelectric ceramic precision displacement measurement.
应用推荐