高频振动去除亚微米颗粒即刻不损坏晶圆。
High frequency vibration removes submicron particle instantly without damaging wafers.
本文综述了深亚微米光刻和纳米光刻技术。
In this article, deep submicron lithography and nano processing are reviewed.
测量精度为亚微米量级。
介绍了一种新的亚微米发射极窗口刻蚀工艺。
This paper introduces a novel submicron etching technology for emitter window.
随着深亚微米技术，串扰噪声问题越来越严重。
With deep submicron technology, crosstalk noise becomes more and more serious.
报道用远紫外准分子激光进行亚微米光刻的实验结果。
Experimental results of deep submicron lithography with a excimer laser are reported in this paper.
并给出远紫外光刻亚微米级图形的电镜扫描照片结果。
The results of electronic microscope scanning of sub-micrometer patterns by far ultraviolet lithography are given.
对深亚微米器件中热载流子效应(hce)进行了研究。
The hot carrier effects (HCE) in deep sub-micron devices has been studied.
亚微米树脂吸附反应是一种快速反应，离线取样分析较困难。
The process of submicron resin adsorption is a kind of rapid reaction, so it is difficult to monitor.
该方法对位移的分辨力在亚微米量级，具有较高的测量精度。
The proposed approach has a high precision since the vibrating displacement is measured at submicrometer resolution.
结果表明，该超细粉分级机可用于微米或亚微米级的粉体分级。
The classifier can be used for classifying powders of micron or submicron size.
亚微米垂直硅墙的制备是垂直硅薄膜耦合约瑟夫逊结的关键工艺。
The fabrication of submicron vertical silicon screen is a key step for fabricating Josephsonjunction coupled by vertical silicon membrane.
最后论证用双光束激光直写系统制作亚微米光栅型导光板的可行性。
At last, the feasibility of fabricating light guide plate by double beam laser direct writing system is confirmed.
建立了一种组装亚微米级聚苯乙烯微球的方法，称作蒸发自组装法。
Evaporation self-assembly method, which is used to assemble sub-micrometer polystyrene microspheres, is presented in this paper.
随着深亚微米工艺的广泛应用，瞬态故障已成为芯片失效的主要原因。
Since deep submicron manufacturing process is widely used in microprocessors, transient faults have become the main source of chip faults.
实验表明，该算法的软件实现可以将像点的位置坐标提高到亚微米级。
The experiment shows that realizing the algorithm can improve the accuracy of image's coordinate to sub-micro level.
MEMS中大量使用薄膜材料，厚度可达微米、亚微米直至纳米量级。
Thin films are widely used in MEMS with different thicknesses from micron, sub-micron to nanometer scale.
深亚微米集成电路的互连线延迟是设计中需十分重视并必须解决的问题。
Interconnect wire delay is a very important question that must to be resolved in deep submicron IC design.
光刻校正技术已成为超深亚微米下集成电路设计和制造中关键的技术。
The optical lithography correction techniques become key technologies in the IC designing and manufacturing of VDSM.
激光散射是研究液体中高分子和亚微米颗粒动态行为的最有效方法之一。
Laser light scattering is one of the most efficient approaches exploring the dynamics of polymer and sub-micrometer particles in liquid.
超细晶粒钢依靠生成微米级或亚微米级的铁素体，使钢的强度和韧性大大提高。
The strength and toughness of super fine grain steels are greatly increased because of its micrometer or sub micrometer grade grain size.
该方法采用边界拟合和“路径匹配”技术，使位移量的检测精度达到了亚微米级。
Sub-micron accuracy of displacement detection is obtained by adopting edge fitting technology and path matching technology.
实验结果表明，基于激光莫尔信号的精密定位装置可获得亚微米级的平面定位精度。
The experimental results show that submicron level plane positioning accuracy can be achieved by the precision positioning device based on laser Moire signal.
当特征尺寸进入到微米、亚微米量级时，需要克服“极限”束缚，增加器件的集成度。
When the characteristic size reach micron, submicron degree, overcoming the "limit" binding in order to increase the integration of device.
将亚微米级单分散颗粒实现三维有序聚集组装成胶体晶体是制备光子晶体的方法之一。
One of the effective ways to fabricate photonic crystal is the method of self-assembly: obtaining colloid crystal from sub-micrometer colloidal spheres.
本文以湍流式超细粉碎机为研究对象，利用该机制取了几种材料的亚微米级超细粉体。
Pulverizer of turbulence was researched in this thesis, by which several materials submicron superfine powder were prepared.
在此基础上，提出了反应沉淀法制备亚微米粒子过程中颗粒粒度及粒度分布的控制方法。
The influences of these factors and the method for controlling particle size distribution were presented for the reaction precipitation process.
针对深亚微米工艺下版图设计中存在的时序收敛问题，提出了一种区域约束的版图设计方法。
A new method for layout design based on region constraints was presented to resolve the timing closure problem of physical design in deep sub-micron technology.
深亚微米和纳米级的半导体技术迅速进步，使得集成电路的设计已经进入系统集成芯片时代。
The rapid progress of semi-conductor technology on deep sub-micro and nanometer scale announces the SOC era of IC design.
运动增量编码器(IME)是一种新型的轴心轨迹测量传感器，其测量灵敏度可以达到亚微米级。
Incremental motion encoder (IME) is a new type of transducer for shaft center trace measurement with resolution up to sub-micro.
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