它在成像物镜的像方空间放置光栅，利用光栅的衍射原理，使来自参考物和被测物的光波在像面发生干涉。
Grating is placed in image space of objective lens, and used as the shearing part. Light wave from reference object and measured object interfered at the image space.
提出一种结构简单的显微物镜波面像差测定干涉仪。
We have developed a simple interferometer to test the microscopic objective.
提出一种结构简单的显微物镜波面像差测定干涉仪。
We have developed a simple interferometer to test the microscopic objective.
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