本文研究了混合气体比例、气体钝化、窗口污染和存放时间对横向流动氯化氙准分子激光器寿命的影响。
The effects of gas mixture ratio, gas passivation, optical window deposition and laser gas storage time on the lifetime of a transverse flow XeCl excimer laser were studied in detail.
本文研究了混合气体比例、气体钝化、窗口污染和存放时间对横向流动氯化氙准分子激光器寿命的影响。
The effects of gas mixture ratio, gas passivation, optical window deposition and laser gas storage time on the lifetime of a transverse flow XeCl excimer laser were studied in detail.
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