Theresult clearly showed that plasma edge damage is imporan in submicron devices andthis effect can dramatically influence the hot-carrier reliability of the devices.
从测量结果中可以清楚的看到等离子体边缘损伤在亚微米MOS器件中是非常严重的,它严重影响了器件的热载流子可靠性。
参考来源 - 等离子体工艺引起的MOSFET栅氧化层损伤研究·2,447,543篇论文数据,部分数据来源于NoteExpress
Finally, the property of materials is a key factor affecting the edge damage, the hard-brittle materials with good ductility have little edge damage after grinding.
另外材料自身特性也是影响边界缺陷的关键因素,塑性好的材料磨削后其边界缺陷相对较少。
In the best parameter combination, major edge damage percentage is 55%, minor edge damage percentage is 20%, no damage percentage is 25%, and serious damage percentage is 0.
在该参数下严重破损率为0,严重蔗皮破损率为55%,轻微蔗皮破损率为20%,无破损率为25%。
As the ambulance took him on a five-hundred-dollar ride to the hospital, my editor walked to the edge of the stage, waved me over, and said, 'I think you've done enough damage with this story.
当他被那辆要花500美元跑一趟的救护车送去医院的时候,我的编辑走到舞台边上招手让我过去,他说:“我看你用这个故事造成的破坏已经够多的了。”
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