为了实现射频传输线的薄衬底结构，根据共面波导的设计思想，设计了腔体式共面波导型射频微机械开关。
In order to realize thin dielectric structure of the transmission line and combined the principle of the design of CPW, a cavity structure has also been studied.
微机械射频开关作为MEMS执行器的一种，是微机械技术中的一类有代表性的结构，是很多微机械器件的基础。
As a kind of MEMS actuators, micro mechanical radio frequency switch is a representational structure of micromechanical technology, and basis of many micro mechanical components.
应用计算机辅助设计(CAD)方法模拟设计一种射频微机械(RF - MEMS)开关。
RF MEMS switch is designed by computer aided design (CAD) method.
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