...分析与设计 关键词:微机械振动陀螺仪;闭环驱动;自激振荡;锁相环 [gap=874]Key words:micromachined vibratory gyroscope;closedloop driving;selfdriveoscillation;phaselocked loop ..
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粘滞阻尼的研究对硅微机械振动陀螺仪的设计至关重要。
Study on viscous damping is critical for the design of silicon micromechanical vibratory gyroscopes.
测试结果表明,该单片三轴硅微机械振动陀螺仪驱动模态的实际谐振频率与理论值之间的最大误差小于5%,满足设计要求。
The results indicated that the maximum error of the resonant frequencies be - tween the practical values and the theoretical ones was within 5%, meeting the design requirements.
推导了硅微机械振动轮陀螺仪的动力学方程,给出了它的运动规律,分析了载体绕空间任意轴匀速旋转时干扰力矩所引起的漂移率。
This paper gives the dynamic equations of vibratory wheel silicon micromechanical gyroscope and their motion law, analyses drifts of the gyroscope, when vehicle rotates around any axis uniformly.
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